## Abstract SiC film was deposited by electron beam‐physical vapor deposition on thermal oxidized silicon substrates at 750°C, and SiC/SiO~2~ composite thin film was prepared. The obtained composite film was analyzed by Fourier‐transform infrared (FTIR) transmission and reflection spectroscopy, and
Thermodynamic Aspects of Diamond/β-SiC Composite Films
✍ Scribed by Vadali V. S. S. Srikanth; Vicente Braz Trindade; Thorsten Staedler; Xin Jiang
- Publisher
- John Wiley and Sons
- Year
- 2008
- Tongue
- English
- Weight
- 323 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0948-1907
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## Abstract The main trends that govern the continuous‐feed physical vapor transport (PVT), bulk‐crystal‐growth process is investigated experimentally, together with thermodynamic and computation fluid dynamics (CFD) calculations. Several chemical systems are considered. An analysis of the chemistr
1(2), b =1054.2(2), c = 1257.7(3) pm; a = 80.19(2), p = 80.55(2). 7 = SS.OS(2)'; Z = 2; pEalrd = 1 706 g ~m -~; R = 0.039 (R, = 0.025) for 3804 independent reflections. 1, monoclinic, P2Jc (no. 14); a =1329.1(3), b = 978.4(2), c = 1524.8(3) pm; / 3 = 95.53(1)"; 2 = 4; pralcd = 1.526 g ~m -~; R = 0.0