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Thermodynamic and kinetic properties of arsenic-implanted silicon

✍ Scribed by G.F. Cerofolini; P. Manini; L. Meda; M.L. Polignano; G. Queirolo; F. Nava; G. Ottaviani; M. Gallorini


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
784 KB
Volume
135
Category
Article
ISSN
0040-6090

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