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Thermodynamic analysis of vapor-phase epitaxial growth of GaAsN on Ge

โœ Scribed by Jun Kawano; Yoshihiro Kangawa; Tomonori Ito; Koichi Kakimoto; Akinori Koukitu


Book ID
116630194
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
486 KB
Volume
343
Category
Article
ISSN
0022-0248

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Halide vapor phase epitaxy of ZnO studie
โœ Tetsuo Fujii; Naoki Yoshii; Yoshinao Kumagai; Akinori Koukitu ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 521 KB

Thermodynamic analyses of halide vapor phase epitaxy (HVPE) for the growth of ZnO were conducted to investigate the effects of growth conditions against growth rates. The partial pressures of gaseous species in equilibrium with ZnO and the resultant driving force for ZnO deposition are calculated wi