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Thermodynamic analysis of GaAs growth by cold-wall metalorganic-chloride vapor phase epitaxy

✍ Scribed by Hitoshi Ikeda; Kenichi Saitoh; Yoshitugu Hasegawa; Akinori Koukito; Hisashi Seki

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 333 KB
Volume: 115
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90740-v

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