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Thermal Treatment Effects on Microstructure and Mechanical Properties of TiAlN Thin Films

✍ Scribed by A.E. Santana; A. Karimi; V.H. Derflinger; A. Schütze

Publisher
Springer US
Year
2004
Tongue
English
Weight
564 KB
Volume
17
Category
Article
ISSN
1023-8883

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Thin carbon films are used to hermetically seal and improve the performance of devices exposed to extreme conditions. Such films, which are deposited by chemical vapor deposition, develop residual thermal stresses due to a mismatch in the coefficient of thermal expansion between the film and substra