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Investigation of thermal annealing effects on microstructural and optical properties of HfO2 thin films

✍ Scribed by M. Modreanu; J. Sancho-Parramon; O. Durand; B. Servet; M. Stchakovsky; C. Eypert; C. Naudin; A. Knowles; F. Bridou; M.-F. Ravet

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 744 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.06.005

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## Abstract Nanostructured titanium dioxide thin films were prepared using reactive pulsed laser ablation technique. Effects of annealing on the structural, morphological, electrical and optical properties are discussed. The structural, electrical and optical properties of TiO~2~ films are found to