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Thermal stability of TiSi2 on mono- and polycrystalline silicon

✍ Scribed by Wong, C. Y.; Wang, L. K.; McFarland, P. A.; Ting, C. Y.


Book ID
127105998
Publisher
American Institute of Physics
Year
1986
Tongue
English
Weight
474 KB
Volume
60
Category
Article
ISSN
0021-8979

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