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Thermal stability of TiSi2 on ion implanted silicon

✍ Scribed by J.F. Chen; L.J. Chen; W. Lur

Book ID: 113284948
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 721 KB
Volume: 96
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)00519-2

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