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Thermal stability of dopants in laser annealed silicon

✍ Scribed by Takamura, Y.; Jain, S. H.; Griffin, P. B.; Plummer, J. D.

Book ID: 121292451
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 334 KB
Volume: 92
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1481975

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