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Thermal stability of AuPt/n−-GaAs Schottky contacts

✍ Scribed by P. Macháč; V. Peřina


Book ID
110337475
Publisher
Springer US
Year
2002
Tongue
English
Weight
397 KB
Volume
13
Category
Article
ISSN
0957-4522

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The thermal stability of physical, chemical, and electrical properties of magnetron-deposited NbN thin films on GaAs were investigated. A variety of characterization methods, including Auger analysis, Rutherford backscattering spectrometry analysis, and Schottky barrier measurement showed that the N