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Thermal stability of TaN Schottky contacts on n-GaN

✍ Scribed by J.R Hayes; D-W Kim; H Meidia; S Mahajan


Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
248 KB
Volume
51
Category
Article
ISSN
1359-6454

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The thermal stability of physical, chemical, and electrical properties of magnetron-deposited NbN thin films on GaAs were investigated. A variety of characterization methods, including Auger analysis, Rutherford backscattering spectrometry analysis, and Schottky barrier measurement showed that the N