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Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics

โœ Scribed by N. Ahner; S.E. Schulz; F. Blaschta; M. Rennau

Book ID
104051805
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
241 KB
Volume
84
Category
Article
ISSN
0167-9317

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