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Thermal processing of silicon wafers with microwave co-heating

✍ Scribed by H Zohm; E Kasper; P Mehringer; G.A Müller

Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 148 KB
Volume: 54
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(00)00413-5

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