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Thermal nanoimprint (T-NIL) with photoresists for hybrid lithography

✍ Scribed by Dhima, Khalid (author);Steinberg, Christian (author);Möllenbeck, Saskia (author);Mayer, Andre (author);Scheer, Hella-Christin (author)


Book ID
120058966
Publisher
SPIE
Year
2011
Weight
487 KB
Volume
7985
Category
Article
ISBN
0819485535
ISSN
0277-786X

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