✦ LIBER ✦
mr-NIL 6000LT – Epoxy-based curing resist for combined thermal and UV nanoimprint lithography below 50 °C
✍ Scribed by Christine Schuster; Freimut Reuther; Anett Kolander; Gabi Gruetzner
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 258 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
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