Thermal effects on the photoresist AZ1350J: F. H. Dill and J. M. Shaw IBM J. Res. Develop., p.210 (May 1977)

• Book ID: 108360957
• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 139 KB
• Volume: 10
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(79)80076-2