Thermal effects on the photoresist AZ1350J : F. H. Dill and J. M. Shaw. IBM J. Res. Develop. p. 210 (May 1977)

• Book ID: 103277804
• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 132 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(77)90545-5