Thermal analysis of positive photoresist films by mass spectrometry : J. M. Shaw, M. A. Frisch and F. H. Dill. IBM J. Res. Develop. p. 219 (May 1977)

• Book ID: 103277797
• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 129 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(77)90538-8