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Thermal donor annihilation and defect production in n‐type silicon by rapid thermal annealing

✍ Scribed by Tokuda, Yutaka; Kobayashi, Nobuji; Usami, Akira; Inoue, Yajiro; Imura, Makoto


Book ID
118239617
Publisher
American Institute of Physics
Year
1989
Tongue
English
Weight
840 KB
Volume
66
Category
Article
ISSN
0021-8979

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