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Extended defect removal in silicon by rapid thermal annealing

✍ Scribed by L. Calcagno; C. Spinella; S. Coffa; E. Rimini

Book ID: 112752927
Publisher: Italian Physical Society
Year: 1990
Tongue: English
Weight: 425 KB
Volume: 12
Category: Article
ISSN: 0392-6737
DOI: 10.1007/bf02451260

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