𝔖 Bobbio Scriptorium

✦ LIBER ✦

Thermal assembly of polysilicon microstructures: G. K. Fedder, R. T. Howe, Micro Electro Mechanical Systems — MEMS '91, Jan 30–Feb 2, 1991, pp. 63–68. IEEE Service Center, Piscataway, NJ

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 124 KB
Volume: 14
Category: Article
ISSN: 0141-6359
DOI: 10.1016/0141-6359(92)90213-g

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