𝔖 Bobbio Scriptorium
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Laser-chemical three-dimensional writing of multimaterial structures for microelectromechanics: T. M. Bloomstein, D. J. Ehrlich, Micro Electro Mechanical Systems — MEMS '91, Jan 30–Feb 2, 1991. pp. 202–203. IEEE Service Center. Piscataway, NJ


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
129 KB
Volume
14
Category
Article
ISSN
0141-6359

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