𝔖 Bobbio Scriptorium

✦ LIBER ✦

Integrated microelectromechanical systems: A perspective on MEMS in the 90s: K. D. Wise, Micro Electro Mechanical Systems — MEMS '91, Jan 30–Feb 2, 1991. pp. 33–38. IEEE Service Center. Piscataway, NJ

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 136 KB
Volume: 14
Category: Article
ISSN: 0141-6359
DOI: 10.1016/0141-6359(92)90187-2

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