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Thermal annealing study of carbon films formed by the plasma decomposition of hydrocarbons

✍ Scribed by M.P. Nadler; T.M. Donovan; A.K. Green

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 355 KB
Volume: 116
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(84)90441-3

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