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Thermal annealing effects on a compositionally graded SiGe layer fabricated by oxidizing a strained SiGe layer

✍ Scribed by Kunhuang Cai; Cheng Li; Yong Zhang; Jianfang Xu; Hongkai Lai; Songyan Chen

Book ID: 108060505
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 787 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.02.075

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