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Thermal and flow issues in the design of metalorganic chemical vapor deposition reactors

✍ Scribed by A.I. Gurary; G.S. Tompa; A.G. Thompson; R.A. Stall; P.A. Zawadzki; N.E. Schumaker

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 720 KB
Volume: 145
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(94)91120-7

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