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Theory of the growth of SiO2 in an oxygen plasma

✍ Scribed by A. Kiermasz; W. Eccleston; J.L. Moruzzi

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 383 KB
Volume: 26
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(83)90144-2

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