Theory of the growth of SiO2 in an oxygen plasma : A. Kiermasz, W. Eccleston and J. L. Moruzzi. Solid-St. Electron.26 (12), 1167 (1983)

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 134 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(84)90377-9