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Theory and measurements of flip-chip interconnects for frequencies up to 100 GHz

✍ Scribed by Jentzsch, A.; Heinrich, W.


Book ID
114554083
Publisher
IEEE
Year
2001
Tongue
English
Weight
282 KB
Volume
49
Category
Article
ISSN
0018-9480

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## Abstract In this article, double‐stacked and triple‐stacked metal‐insulator‐metal (MIM) capacitors fabricated in 0.18 μm CMOS process are reported. These provide high‐capacitance density of 2 fF/μm^2^ and 3.2 fF/μm^2^ and excellent dc and RF characteristics, respectively. The lumped circuit mode