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Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors

✍ Scribed by Dooyoung Hah; Patterson, P.R.; Nguyen, H.D.; Toshiyoshi, H.; Wu, M.C.

Book ID: 114569840
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 492 KB
Volume: 10
Category: Article
ISSN: 1077-260X
DOI: 10.1109/jstqe.2004.829200

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