✦ LIBER ✦
Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drives
✍ Scribed by Xiao-Ying Li; Qian Jin; Da-Yong Qiao; Bao-Peng Kang; Bin Yan; Yao-Bo Liu
- Publisher
- Springer-Verlag
- Year
- 2011
- Tongue
- English
- Weight
- 788 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.