Theoretical study of the ultimate resolution in electron beam lithography by Monte Carlo simulation, including secondary electron generation: Energy dissipation profile in polymethylmethacrylate

✍ Scribed by Samoto, Norihiko; Shimizu, Ryuichi

• Book ID: 121337122
• Publisher: American Institute of Physics
• Year: 1983
• Tongue: English
• Weight: 482 KB
• Volume: 54
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.332610