✦ LIBER ✦
7356. Monte Carlo simulation of energy dissipation in electron beam lithography including secondary electron generation: Kang-Yoon Lee et al, J Appl Phys, 67, 1990, 7560–7567
- Book ID
- 103470996
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 148 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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