Monte Carlo simulation of the energy dissipation profiles of 30, 50 and 100 keV incident beams in a layered structure in electron beam lithography

✍ Scribed by Sun Yuping; Liu Hua

• Book ID: 112929240
• Publisher: SP Science Press
• Year: 1987
• Tongue: English
• Weight: 385 KB
• Volume: 4
• Category: Article
• ISSN: 0217-9822
• DOI: 10.1007/bf02893130