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Theoretical studies on the growth mechanisms of silicon thin films by atomic layer epitaxy

✍ Scribed by Pipsa Hirva; Tapani A. Pakkanen

Publisher: Elsevier Science
Year: 1989
Weight: 45 KB
Volume: 220
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(89)90700-7

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