𝔖 Bobbio Scriptorium

✦ LIBER ✦

Theoretical studies on CH2 adsorption process in β-SiC vapor phase epitaxial growth

✍ Scribed by Yoshio Ohshita

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 597 KB
Volume: 110
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90288-g

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Studies of growth processes from the vap

Studies of growth processes from the vapour phase of silicon carbide epitaxial layers: III. Thermodynamics of the high temperature processes in the system SiC-N2 at constant volume

✍ S.K. Lilov; Yu.M. Tairov; V.F. Tsvetkov; B.F. Yudin 📂 Article 📅 1977 🏛 Elsevier Science 🌐 English ⚖ 629 KB

Studies of growth processes in silicon c

Studies of growth processes in silicon carbide epitaxial layers from the vapour phase: II. Thermodynamic analysis of equilibrium in the SiC-H2 system at constant hydrogen pressure

✍ S.K. Lilov; Yu.M. Tairov; V.F. Tsvetkov; B.F. Yudin 📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 602 KB