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Theoretical analysis of equilibrium adsorption layers in CVD systems (Si-H-Cl, Ga-As-H-Cl)

✍ Scribed by A.A. Chernov; M.P. Rusaikin

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 704 KB
Volume: 45
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(78)90417-7

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