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Influence of temperature on the crystal habit of silicon in the SiHCl CVD system I. Experimental results

✍ Scribed by J.G.E. Gardeniers; W.E.J.R. Maas; R.Z.C. Van Meerten; L.J. Giling

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 898 KB
Volume: 96
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(89)90642-8

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