Influence of temperature on the crystal habit of silicon in the SiHCl CVD system II. Surface tension of faces in the 〈110〉 zones

✍ Scribed by J.G.E. Gardeniers; W.E.J.R. Maas; R.Z.C. van Meerten; L.J. Giling

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 975 KB
• Volume: 96
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(89)90643-x