Thec/aaxial ratio of RF sputtered ZnO thin films on stainless steel substrates
β Scribed by Ahmed S. Khan; Ashok Ambardar
- Publisher
- Springer
- Year
- 1985
- Tongue
- English
- Weight
- 248 KB
- Volume
- 4
- Category
- Article
- ISSN
- 0261-8028
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract Transparent conducting, aluminium doped zinc oxide thin films (ZnO:Al) were deposited by radio frequency (RF) magnetron sputtering. The RF power was varied from 60 to 350βW whereas the substrate temperature was kept at 160βΒ°C. The structural, electrical and optical properties of the asβ
## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radioβfrequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), Xβray diffraction, and Xβray photoelec