The void fraction of rf-sputtered SrTiO3 film characterized by spectroscopic ellipsometry
β Scribed by P.K. Shon; B.S. Jeong; H.L. Park
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 376 KB
- Volume
- 95
- Category
- Article
- ISSN
- 0038-1098
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π SIMILAR VOLUMES
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Stoichiometric Ba x Sr 1Γx TiO 3 (BST) thin films with various values of x were prepared on Si(100) substrates by the sol-gel method. The influence of Sr content on the structure and the optical properties was studied by X-ray diffraction (XRD) and spectroscopic ellipsometry (SE) in the UV-visible r
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YBa,Cu,O,\_x superconducting thin films with a-axis perpendicular to the substrate were grown on both LaSrGaO, (100) and SrTiO, (100) single crystals by off-axis rf sputtering and their properties were compared. The film grown at 740 "C on a self-template layer grown in situ at 650 "C on LaSrGaO, (1