✦ LIBER ✦

The use of the ion beam current as a process control in the reactive sputtering of zirconium oxide

✍ Scribed by Masaaki Yoshitake; Toshikazu Nosaka; Akio Okamoto; Soichi Ogawa

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

On the pole of physical sputtering in re

✍ P.C. Zalm; L.J. Beckers; F.H.M. Sanders 📂 Article 📅 1983 🏛 Elsevier Science ⚖ 400 KB

Ion bombardment of AlN films deposited i

✍ K. Alkjærsig; H.B. Christensen; B.K. Gupta; H. Jensen; U.M. Jensen; G.N. Pederse 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 881 KB

The analysis and automatic control of a

✍ K. Enjouji; K. Murata; S. Nishikawa 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 317 KB

The use of compound semiconductors in a

✍ R.M. Allen 📂 Article 📅 1970 🏛 Elsevier Science ⚖ 152 KB

The use of optical emission spectroscopy

✍ K Salmenoja; AS Korhonen 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 278 KB

Practical aspects for the use of plasma

✍ CD Tsiogas; JN Avaritsiotis; CA Kagarakis 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 739 KB