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The use of ion beams in thin film deposition

✍ Scribed by DG Armour; P Bailey; G Sharples

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 737 KB
Volume: 36
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(86)90110-7

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