The use of extraction tests for deciding waste disposal options
β Scribed by Cary L. Perket; Jean R. Krueger; Donald A. Whitehurst
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 689 KB
- Volume
- 1
- Category
- Article
- ISSN
- 0165-9936
No coin nor oath required. For personal study only.
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In the electron beam testing of integrated circuits, local transverse electric fields cause error to voltage measurements. Presently, the solution is to place a i-5 kV voltage extraction electrode a few millimetres above the specimen. An alternative method is to use a micro-extraction electrode that