The synthesis mechanism of complex oxide films formed in dense RF — plasma by reactive sputtering of stoichiometric targets

✍ Scribed by Mukhortov, V. M.; Golovko, Y. I.; Tolmachev, G. N.; Klevtzov, A. N.

• Book ID: 120926208
• Publisher: Taylor and Francis Group
• Year: 2000
• Tongue: English
• Weight: 485 KB
• Volume: 247
• Category: Article
• ISSN: 0015-0193
• DOI: 10.1080/00150190008214943