✦ LIBER ✦
Influence of defects in the silicon wafer on the properties of silicon oxide films formed by reactive sputtering : D. Kropman, M. Vinnal and P. Putk. Vacuum 27 (3) 125 (1977)
- Publisher
- Elsevier Science
- Year
- 1977
- Tongue
- English
- Weight
- 130 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0026-2714
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