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The study of the microstructures in Ar+ laser crystallized aSi:H films for active layer of TFT

✍ Scribed by Huang Xinfan; Zhang Xiangdong; Zhu Weiying; Chen Yingying

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 123 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91265-p

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