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The structure and photoluminescence properties of RF-sputtered films of ZnO on Teflon substrate

✍ Scribed by Yun-yan Liu; Yu-zhen Yuan; Cheng-feng Li; Xu-tuan Gao; Xin-zhong Cao; Jiang-bo Li

Book ID
113791877
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
308 KB
Volume
62
Category
Article
ISSN
0167-577X

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec