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The structural, electrical and optical properties of ZnO/Al2O3 multilayer deposited on PET substrates by RF sputtering

โœ Scribed by N. Khazamipour; Sh. Kabiri-Ameri-Aboutorabi; E. Asl-Solaimani


Book ID
118500441
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
487 KB
Volume
49
Category
Article
ISSN
0960-1481

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The N-doped b-Ga 2 O 3 films were grown on Si and quartz substrates by RF magnetron sputtering in different ammonia partial pressure ratios (from 0% to 30%). The influence of ammonia partial pressure ratios and annealing treatment on the optical and structural properties were studied. The microstruc