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The structural and electrical characterization of a HfErOx dielectric for MIM capacitor DRAM applications

✍ Scribed by B. Toomey; K. Cherkaoui; S. Monaghan; V. Djara; É. O’Connor; D. O’Connell; L. Oberbeck; E. Tois; T. Blomberg; S.B. Newcomb; P.K. Hurley

Book ID
113797946
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
387 KB
Volume
94
Category
Article
ISSN
0167-9317

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